Instruments
Transmission Electron Microscopes (Share use equipment)
Titan
透過型電子顕微鏡(TEM/STEM)
Probe Correcter
Monochrometer
60-300 kV
EDX, EELS, Tomography, in-situ
JEM ARM200F
透過型電子顕微鏡(TEM/STEM)
Probe Correcter
60-200 kV
EDX, Tomography, in-situ
ASTAR Precession
Tecnai 20F
JEM 2010
Scanning Electron Microscope (Share use equipment)
Scios
Thermo Fischer Scientific Inc.
FIB-SEM
FE-SEM, high-resolution
SEM detectors: E-T, BSE, in-lens SE
EBSD (Oxford Instruments, Symmetry)
Ga-ion FIB
Versa 3D
Thermo Fischer Scientific Inc.
FIB-SEM
FE-SEM
SEM detectors: E-T, BSE
EBSD (TSL)
Ga-ion FIB
Ultra 55
Carl Zeiss
FE-SEM
SEM detectors: E-T, EsB, HD-AsB, in-lens SE
EBSD (TSL)
Thermo Fischer Scientific Inc.
PFIB-SEM
FE-SEM
SEM detectors: E-T, BSE, in-lens SE/BSE
Immersion lens mode
EDX (Oxford Instruments, Ultima)
EBSD (Oxford Instruments, Symmetry)
TOF-SIMS
Plasma FIB: Xe, Ar, O, N
Helios 5 Hydra
試料作製装置
SEM Mill
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CP
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